Principles of Micro- and Nano-Fabrication
微纳光电子材料与器件工艺原理
4.1 ---- Photolithography - Optics
4.2 ---- Photolithography - Photoresists
6.1 ---- Film Deposition - Epitaxy
6.2 ---- Film Deposition - Si Oxidation
6.3 ---- Film Deposition - Silicide
6.4 ---- Film Deposition - CVD
6.5 ---- Film Deposition - PVD
6.6 ---- Film Deposition - Wet
7.4 ---- Etching - CMP and others
8 ---- Packaging and Integration