Principles of Micro- and Nano-Fabrication

微纳光电子材料与器件工艺原理

1 ---- Introduction

2 ---- Materials

3 ---- Cleanroom

4.1 ---- Photolithography - Optics

4.2 ---- Photolithography - Photoresists

5 ---- Doping

6.1 ---- Film Deposition - Epitaxy

6.2 ---- Film Deposition - Si Oxidation

6.3 ---- Film Deposition - Silicide

6.4 ---- Film Deposition - CVD

6.5 ---- Film Deposition - PVD

6.6 ---- Film Deposition - Wet

7.1 ---- Etching - Overview

7.2 ---- Etching - Wet

7.3 ---- Etching - Dry

7.4 ---- Etching - CMP and others

8 ---- Packaging and Integration

Lab 1 ---- Photolithography

Lab 2 ---- Deposition

Lab 3 ---- Etching

Lab 4 ---- Microfluidics

Note: I have been teaching this course since 2017. One year later, the US-China trade war began and significantly impacted Huawei, ZTE and the entire microchip industry in China.